Mass transport and thermal stability of TiN/Al2O3/InGaAs nanofilms
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4751435
Reference41 articles.
1. Fundamentals of III-V Semiconductor MOSFETs
2. InGaAs and Ge MOSFETs with high κ dielectrics
3. Identification and thermal stability of the native oxides on InGaAs using synchrotron radiation based photoemission
4. Indium stability on InGaAs during atomic H surface cleaning
5. Half-cycle atomic layer deposition reaction studies of Al2O3 on In0.2Ga0.8As (100) surfaces
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