Design and use of a gridded probe in a low‐pressure rf argon discharge
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1141113
Reference23 articles.
1. Diagnostics and modelling of a methane plasma used in the chemical vapour deposition of amorphous carbon films
2. Energy Distribution of Electrons in High Frequency Gas Discharges
3. Elastic and Inelastic Scattering of Low‐Velocity Ions: Ne+ in A, A+ in Ne, and A+ in A
4. Ion and electron energy analysis at a surface in an RF discharge
5. Electrostatic Energy Analyzer for Studying Gas‐Focused Electron Beams and Their Background Media
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