Theoretical calculation of the acoustic force on a patterned silicon wafer during megasonic cleaning
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1287224
Reference9 articles.
1. Vortices and Streams Caused by Sound Waves
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3. Numerical Analysis of Single Bubble Behavior in a Megasonic Field by Non-Spherical Eulerian Simulation;ECS Journal of Solid State Science and Technology;2014
4. A quartz-bar megasonic system for nano-pattern cleaning;International Journal of Precision Engineering and Manufacturing;2013-10
5. Numerical Study of Single Bubble Dynamics in Megasonic Field for New Physical Cleaning Method;ECS Transactions;2013-08-31
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