The effects of Xe on an rf plasma and growth of ZnO films by rf sputtering
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1682682
Reference25 articles.
1. Exotic Doping for Zno Thin Films: Possibility of Monolithic Optical Integrated Circuit
2. Low‐loss epitaxial ZnO optical waveguides on sapphire by rf magnetron sputtering
3. ZnO films for surface acoustooptic devices on nonpiezoelectric substrates
4. Characterization of homoepitaxial p-type ZnO grown by molecular beam epitaxy
5. Second harmonic generation in laser ablated zinc oxide thin films
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