Ultralow-dark-current wafer-bonded Si/InGaAs photodetectors
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.124943
Reference11 articles.
1. High-quality InGaAs/InP multiquantum-well structures on Si fabricated by direct bonding
2. High‐performance InGaAs photodetectors on Si and GaAs substrates
3. Room-temperature CW operation of InGaAsP lasers on Si fabricated by wafer bonding
4. Wafer Fusion for Surface-Normal Optoelectronic Device Applications
5. Wafer bonding technology and its applications in optoelectronic devices and materials
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