Attachment loss of micromechanical and nanomechanical resonators in the limits of thick and thin support structures
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2401271
Reference36 articles.
1. Dissipation in nanocrystalline-diamond nanomechanical resonators
2. Energy dissipation in submicrometer thick single-crystal silicon cantilevers
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5. On the modes and loss mechanisms of a high Q mechanical oscillator
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