Actuation and transduction of resonant vibrations in GaAs/AlGaAs-based nanoelectromechanical systems containing two-dimensional electron gas
Author:
Affiliation:
1. Rzhanov Institute of Semiconductor Physics, Novosibirsk 630090, Russia
2. Novosibirsk State University, Novosibirsk 630090, Russia
Funder
RAS Department of Nanotechnologies and Information Technologies
Russian Academy of Sciences Presidium
Russian Foundation for Basic Research (RFBR)
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4920932
Reference23 articles.
1. A nanomechanical mass sensor with yoctogram resolution
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