High resolution Si position sensor
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.109108
Reference13 articles.
1. A New Semiconductor Photocell Using Lateral Photoeffect
2. Application of Lateral Photovoltaic Effect to the Measurement of the Physical Quantities ofP-NJunctions–Sheet Resistivity and Junction Conductance of N2+Implanted Si
3. Position-sensitive photodetectors made with standard silicon-planar technology
4. Photoeffects in Nonuniformly Irradiated p‐n Junctions
5. An InGaAs-InP position-sensing photodetector
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3. Picometre displacement tracking of an optical beam in a silicon Schottky barrier sensor;Electronics Letters;1994-10-27
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