Effects of prior hydrogenation on the structure and properties of thermally nanocrystallized silicon layers
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.367435
Reference34 articles.
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3. Microstructural association of diverse chemical constituents in nc-SiOx:H network synthesized by spontaneous low temperature plasma processing;Physica E: Low-dimensional Systems and Nanostructures;2018-09
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