Mass‐resolved ion energy measurements at the grounded electrode of an argon rf plasma
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.110087
Reference16 articles.
1. Plasma potentials of 13.56‐MHz rf argon glow discharges in a planar system
2. Frequency dependence of ion bombardment of grounded surfaces in rf argon glow discharges in a planar system
3. Distribution of ion energies incident on electrodes in capacitively coupled rf discharges
4. Ion bombardment energy distributions in radio‐frequency glow‐discharge systems
5. Ion transit through capacitively coupled Ar sheaths: Ion current and energy distribution
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