1. Friedrich Schiller University Jena, Institute of Applied Physics, Abbe Center of Photonics 1 , Jena 07745, Germany
2. Institute of Microelectronics of the Chinese Academy of Sciences 2 , 100029 Beijing, China
3. Fraunhofer Institute for Applied Optics and Precision Engineering IOF 3 , Jena 07745, Germany
4. ARC Centre of Excellence for Transformative Meta-Optical Systems (TMOS), Department of Electronic Materials Engineering, Research School of Physics, The Australian National University 4 , Canberra ACT 2600, Australia