Boundary‐condition refinement of the Child–Langmuir law for collisionless dc plasma sheaths
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.346898
Reference6 articles.
1. A Continuum Model of DC and RF Discharges
2. Sheath and presheath in a collisionless plasma with a Maxwellian source
3. A two‐dimensional computer simulation for dry etching using Monte Carlo techniques
4. A Time‐Average Model of the RF Plasma Sheath
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