The validity of Bohm’s sheath criterion in rf discharges
Author:
Publisher
AIP Publishing
Subject
Fluid Flow and Transfer Processes,General Physics and Astronomy,Mechanics of Materials,Condensed Matter Physics,Computational Mechanics
Link
http://aip.scitation.org/doi/pdf/10.1063/1.860189
Reference13 articles.
1. The Bohm criterion and the field singularity at the sheath edge
2. The Bohm criterion and sheath formation
3. Bohm criterion and ion‐acoustic sound barrier
4. Application of the physics of plasma sheaths to the modeling of rf plasma reactors
5. Double probe model of radio frequency capacitively coupled planar discharges
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