Integral force feedback control with input shaping: Application to piezo-based scanning systems in ECDLs-Reference-Cited by-同舟云学术

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Integral force feedback control with input shaping: Application to piezo-based scanning systems in ECDLs

Published:2017-07 Issue:7 Volume:88 Page:075006
ISSN:0034-6748
Container-title:Review of Scientific Instruments
language:en
Short-container-title:Review of Scientific Instruments

Author:

Zhang Meng^ORCID,Liu Zhigang,Zhu Yu,Bu Mingfan,Hong Jun^ORCID

Publisher

AIP Publishing

Subject

Instrumentation

Link

http://aip.scitation.org/doi/pdf/10.1063/1.4993926

Reference27 articles.

1. Design and Analysis of a Compact Precision Positioning Platform Integrating Strain Gauges and the Piezoactuator

2. High Performance Nanopositioning with Integrated Strain and Force Feedback

3. A Survey of Control Issues in Nanopositioning

4. Tracking Control of a Piezoceramic Actuator With Hysteresis Compensation Using Inverse Preisach Model

Cited by 14 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Trajectory optimization method based on ellipse model for dynamic motion control of piezoelectric transducer in an optical resonance cavity;Precision Engineering;2024-01

2. High precision structured H∞ control of a piezoelectric nanopositioning platform;PLOS ONE;2023-06-16

3. Frequency-scanning interferometry for dynamic measurement using adaptive Sage-Husa Kalman filter;Optics and Lasers in Engineering;2023-06

4. Rate-dependent input curve shaping of the piezoelectric actuator based optical resonator cavity displacement characteristics for an external cavity diode laser;Review of Scientific Instruments;2021-09-01

5. Damping-enabling technologies for broadband control of piezo-stages: A survey;Annual Reviews in Control;2021

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