Microwire-based multifunctional microsensors for high-performance humidity and strain sensing

Abstract

In this post-Moore era, on-chip components have transitioned into the “more Moore” and “more than Moore” technology routes. Serving as the foundational point and data source for all intelligent devices, sensors are undergoing development for multifunctionality, systematization, and integration. However, the current micro/nano multifunctional sensor fabrication technology is not sufficiently advanced to meet the requirements of practical applications. In this study, we prepared high-precision microwire arrays as multifunctional microsensors. This microsensor exhibited a highly sensitive response to humidity and bending strain. It has a sensitivity of up to 8520% and response time as low as 0.9/3.5 s (response/recovery) over a wide range of humidity variations from 23% to 97%. In the bending strain range of −0.4–0.4%, the microsensor exhibits a gauge factor of up to 267. This multifunctional microsensor has the potential for use in integrated intelligent devices.