Wet etch process for patterning insulators suitable for epitaxial highTcsuperconducting thin film multilevel electronic circuits
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.105469
Reference12 articles.
1. Nonaqueous chemical etch for YBa2Cu3O7−x
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4. High-T/sub c/ superconductive microwave filters
5. Multilayer YBa2Cu3Ox‐SrTiO3‐YBa2Cu3Oxfilms for insulating crossovers
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