Experimental and numerical investigations of electron characteristics in 2 MHz and 13.56 MHz inductively coupled hydrogen plasmas with an expansion region-Reference-Cited by-同舟云学术

Experimental and numerical investigations of electron characteristics in 2 MHz and 13.56 MHz inductively coupled hydrogen plasmas with an expansion region

Published:2018-01 Issue:1 Volume:25 Page:013515
ISSN:1070-664X
Container-title:Physics of Plasmas
language:en
Short-container-title:Physics of Plasmas

Author:

Gao Fei¹,Li Hong¹,Yang Wei¹,Liu Jia²,Zhang Yu-Ru¹,Wang You-Nian¹^ORCID

Affiliation:

1. Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Dalian 116024, People's Republic of China

2. Shanghai Institute of Space Propulsion, Shanghai 201112, People's Republic of China

Funder

the National Magnetic Confinement Fusion Science Program, China

Publisher

AIP Publishing

Subject

Condensed Matter Physics

Link

http://aip.scitation.org/doi/pdf/10.1063/1.5006892

Reference38 articles.

1. In situ cleaning of silicon substrate surfaces by remote plasma-excited hydrogen

2. Hydrogen plasma etching of GaAs oxide