System for time-resolved laser absorption spectroscopy and its application to high-power impulse magnetron sputtering-Reference-Cited by-同舟云学术

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System for time-resolved laser absorption spectroscopy and its application to high-power impulse magnetron sputtering

Published:2017-02 Issue:2 Volume:88 Page:023105
ISSN:0034-6748
Container-title:Review of Scientific Instruments
language:en
Short-container-title:Review of Scientific Instruments

Author:

Adámek P.¹,Olejníček J.¹,Hubička Z.¹,Čada M.¹,Kment Š.¹,Kohout M.¹,Do H. T.²

Affiliation:

1. Institute of Physics v.v.i., Academy of Sciences of the Czech Republic, Na Slovance 2, 182 21 Prague 8, Czech Republic

2. Institute of Physics, Vietnam Academy of Science and Technology, No.18 Hoang Quoc Viet, Cau Giay, Hanoi, Vietnam

Funder

Czech Science Foudation

Technology Agency of the Czech Republic (TACR)

National Foundation for Science and Technology Development (NAFOSTED)

Publisher

AIP Publishing

Subject

Instrumentation

Link

http://aip.scitation.org/doi/pdf/10.1063/1.4975175

Reference22 articles.

1. Measurement of the gas temperature in fluorocarbon radio frequency discharges using infrared absorption spectroscopy

2. Atomic absorption monitor for deposition process control of aluminum at 394 nm using frequency‐doubled diode laser

3. Direct Measurement of Water Cluster Concentrations by Infrared Cavity Ringdown Laser Absorption Spectroscopy

4. Introduction to Nitride Semiconductor Blue Lasers and Light Emitting Diodes

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