Damage effects produced in the near-surface region of x-cut LiNbO3 by low dose, high energy implantation of nitrogen, oxygen, and fluorine ions
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1756219
Reference12 articles.
1. Ion implanted waveguides and waveguide lasers
2. Development of ion implantation for optical applications
3. The formation of waveguides and modulators in LiNbO3by ion implantation
4. Effect of low dose high energy O3+ implantation on refractive index and linear electro-optic properties in X-cut LiNbO3: Planar optical waveguide formation and characterization
5. Surface modifications of LiNbO3 single crystals induced by swift heavy ions
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