Co/Si(111) interface: Formation of an initial CoSi2phase at room temperature
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.98653
Reference29 articles.
1. Double heteroepitaxy in the Si (111)/CoSi2/Si structure
2. Formation of Ultrathin Single-Crystal Silicide Films on Si: Surface and Interfacial Stabilization of Si-NiSi2Epitaxial Structures
3. Formation and structure of epitaxial NiSi2 and CoSi2
4. Cobalt disilicide epitaxial growth on the silicon (111) surface
5. Kinetics of formation and properties of epitaxial CoSi2 films on Si (111)
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