Low‐temperature plasma oxidation of GaAs
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.89839
Reference7 articles.
1. Anomalous frequency dispersion of m.o.s. capacitors formed on n-type GaAs by anodic oxidation
2. Thermal oxidation of GaAs
3. Plasma oxidation of GaAs
4. Oxidation of GaAs1 − x P x Surface by Oxygen Plasma and Properties of Oxide Film
5. First anodic-oxide GaAs m.o.s.f.e.t.s based on easy technological processes
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