A versatile pattern generator for high‐resolution electron‐beam lithography
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1140576
Reference16 articles.
1. Elektronenoptischer Mikroschreiber unter elektronenmikroskopischer Arbeitskontrolle: (Informations-Speicherung auf kleinstem Raum)
2. Nanometer metal-oxide-semiconductor field-effect transistors: A flexible tool for studying inversion layer physics
3. Fabrication and phonon transport studies in nanometer scale free-standing wires
4. Observation of single-electron charging effects in small tunnel junctions
5. Superconducting-Normal Phase Boundary of a Fractal Network in a Magnetic Field
Cited by 28 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Direct Patterning of Conductive Polymer Domains for Photovoltaic Devices;ACS Applied Materials & Interfaces;2012-08-02
2. Investigating Pattern Transfer in the Small-Gap Regime Using Electron-Beam Stabilized Nanoparticle Array Etch Masks;IEEE Transactions on Magnetics;2010-06
3. A Simple Technique for Submicron Scale Patterning of Silver Using Visible Light Interference;Journal of Macromolecular Science, Part A;2008-09-26
4. Fast, high bit number pattern generator for electron and ion beam lithographies;Review of Scientific Instruments;2008-03
5. A new versatile high speed pattern generator for nanolithography;2008 2nd IEEE International Nanoelectronics Conference;2008
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3