Author:
Cooper C. Burleigh,Comas James
Subject
General Physics and Astronomy
Cited by
16 articles.
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1. Six decades of atomic collisions in solids;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2017-09
2. Recollections of fifty years with sputtering;Thin Solid Films;2012-07
3. Texture and surface morphology evolution of Ag(Cu) layers on indium tin oxide thin films;Journal of Physics D: Applied Physics;2008-07-17
4. Monte Carlo simulations of textured planar magnetron targets;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;1993-09
5. Angular, energy, and mass distribution of sputtered particles;Topics in Applied Physics;1991