Characteristics of low energy atom and molecule beams generated by the charge exchange reaction
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2842402
Reference15 articles.
1. High‐power fast‐atom beam source and its application to dry etching
2. New high‐power fast atom beam source
3. A low-energy fast-atom source
4. Sputtering yield and radiation damage by neutral beam bombardment
5. Generation of low-energy neutral beams and radiation damage of SiO2/Si by neutral bombardment
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2. Plasma characteristics of single- and dual-electrode ion source systems utilized in low-energy ion extraction;Review of Scientific Instruments;2014-02
3. Nitriding of Polymer by Low Energy Nitrogen Neutral Beam Source;Applied Physics Express;2012-02-22
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