Environmentally protected hot-stage atomic force microscope for studying thermo-mechanical deformation in microelectronic devices
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1809262
Reference20 articles.
1. From molecules to cells: imaging soft samples with the atomic force microscope
2. Atomic Force Microscope
3. Scanning Probe Microscopy
4. Temperature controlled microstage for an atomic force microscope
5. Fiber interferometer-based variable temperature scanning force microscope
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4. Effect of internal stresses on thermo-mechanical stability of interconnect structures in microelectronic devices;Materials Science and Engineering: A;2006-04
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