Ion milling damage in InP and GaAs
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.346453
Reference18 articles.
1. Effects of ion etching on the properties of GaAs
2. Effects of dry etching on GaAs
3. Characterization of ion beam etching induced defects in GaAs
4. Electrical modelling of Ion- Damaged GaAs schottky barrier interfaces
5. The effects of plasma and ion beam processing on the properties of n-GaAs Schottky diodes
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