Fabrication of sub-12 nm thick silicon nanowires by processing scanning probe lithography masks
Author:
Affiliation:
1. Instituto de Ciencia de Materiales de Madrid, CSIC, Sor Juana Inés de la Cruz 3, 28049 Madrid, Spain
2. Instituto de Microelectrónica de Madrid (IMM-CNM-CSIC), 28760 Tres Cantos, Madrid, Spain
Funder
European Commission (EC)
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4881977
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1. Si Nanowires Forest-Based On-Chip Biomolecular Filtering, Separation and Preconcentration Devices: Nanowires Do it All
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4. Nanomechanical mass sensing and stiffness spectrometry based on two-dimensional vibrations of resonant nanowires
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