Gas Incorporation into Sputtered Films
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1709043
Reference19 articles.
1. Influence of Adsorbed Gas on Surface Diffusion and Nucleation
2. Effect of Residual Gases on Superconducting Characteristics of Tin Films
3. Some Studies of the Superconducting Transition in Purified Tantalum
4. Effects of Nitrogen, Methane, and Oxygen on Structure and Electrical Properties of Thin Tantalum Films
5. Thin Films Deposited by Bias Sputtering
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