Electrical properties of SrTiO3 thin films on Si deposited by magnetron sputtering at low temperature
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1398321
Reference20 articles.
1. Alternative dielectrics to silicon dioxide for memory and logic devices
2. Selection of dielectrics for alternating-current thin-film electroluminescent device
3. Properties of barium titanate (BaTiO3) thin films grown on silicon by rf magnetron sputtering
4. Characterisation of the BaTiO3/p-Si interface and applications
5. Progress in the developments of (Ba,Sr)TiO3 (BST) thin films for Gigabit era DRAMs
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