Note: Simultaneous measurement of in-plane and out-of-plane displacement by using orthogonally polarized self-mixing grating interferometer-Reference-Cited by-同舟云学术

Note: Simultaneous measurement of in-plane and out-of-plane displacement by using orthogonally polarized self-mixing grating interferometer

Published:2018-09 Issue:9 Volume:89 Page:096113
ISSN:0034-6748
Container-title:Review of Scientific Instruments
language:en
Short-container-title:Review of Scientific Instruments

Author:

Shi Liheng¹^ORCID,Kong Lingwen¹,Guo Dongmei¹^ORCID,Xia Wei¹,Ni Xiaoqi¹,Hao Hui¹,Wang Ming¹

Affiliation:

1. Jiangsu Key Laboratory on Opto-Electronic Technology, School of Physics and Technology, Nanjing Normal University, Nanjing 210023, People’s Republic of China

Funder

Major Project of Natural Science Research of Jiangsu Higher Education Institutions of China

Natural Project Foundation of the Higher Education Institutions of Jiangsu Province of China

National Natural Science Foundation of China

Publisher

AIP Publishing

Subject

Instrumentation

Link

http://aip.scitation.org/doi/pdf/10.1063/1.5026471

Reference16 articles.

1. Measurement technologies for precision positioning

2. Two‐frequency displacement measurement interferometer based on a double‐heterodyne technique

3. Optical heterodyne grating interferometry for displacement measurement with subnanometric resolution

4. Design and construction of a two-degree-of-freedom linear encoder for nanometric measurement of stage position and straightness

5. A six-degree-of-freedom surface encoder for precision positioning of a planar motion stage

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Spatially Separated Heterodyne Grating Interferometer for In-Plane and Out-of-Plane Displacement Measurements;Photonics;2022-11-05

2. Influence of Fluorescence to Photon Lifetime Ratio on Detection Sensitivity in Laser Self-Mixing Interferometry;IEEE Access;2020

3. Frequency-Shifted Optical Feedback Measurement Technologies Using a Solid-State Microchip Laser;Applied Sciences;2018-12-29