Energy trapping of thickness-extensional modes in thin film bulk acoustic wave filters-Reference-Cited by-同舟云学术

Energy trapping of thickness-extensional modes in thin film bulk acoustic wave filters

Published:2016-01 Issue:1 Volume:6 Page:015002
ISSN:2158-3226
Container-title:AIP Advances
language:en
Short-container-title:AIP Advances

Author:

Zhao Zinan¹,Qian Zhenghua¹,Wang Bin¹

Affiliation:

1. State Key Laboratory of Mechanics and Control of Mechanical Structures, College of Aerospace Engineering, Nanjing University of Aeronautics and Astronautics, Nanjing 210016, China

Funder

The Natural Science Foundation for Distinguished Young Scholars of Jiangsu Province

National Natural Science Foundation of China (NSFC)

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

http://aip.scitation.org/doi/pdf/10.1063/1.4939695

Reference26 articles.

1. Fundamental‐mode VHF/UHF minature acoustic resonators and filters on silicon

2. Acoustic bulk wave composite resonators

3. ZnO/SiO2-diaphragm composite resonator on a silicon wafer

4. Thin Film Resonators and Filters

5. A review of thin-film resonator technology

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