On the image brightness of the trench bottom surface in a scanning electron microscope
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.351552
Reference5 articles.
1. A Novel High-Resolution Scanning Electron Microscope for the Surface Analysis of High-Aspect-Ratio Three-Dimensional Structures
2. Submicron 3-Dimensional Structure Observation by Cyclotron SEM(Scanning Electron Microscope)
3. A scanning electron microscope for trench observation
4. Theory of Secondary Emission
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