The compact microcrystalline Si thin film with structure uniformity in the growth direction by hydrogen dilution profile
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2126122
Reference19 articles.
1. Proceedings of the 1994 IEEE First World Conference on Photovoltaic Energy Conversion (WCPEC);Meier J.,1994
2. Electrical transport properties of microcrystalline silicon thin films prepared by Cat-CVD
3. Metastability in Undoped Microcrystalline Silicon Thin Films Deposited by HWCVD
4. Properties of microcrystalline silicon. IV. Electrical conductivity, electron spin resonance and the effect of gas adsorption
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