1. State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences 1 , Shanghai 200050, China
2. School of Information Science and Technology, ShanghaiTech University 2 , Shanghai 201210, China
3. School of Materials and Chemistry, University of Shanghai for Science and Technology 3 , Shanghai 200093, China
4. Shanghai Institute of IC Materials Co., Ltd. 4 , Shanghai 201899, China
5. School of Microelectronics, Shanghai University 5 , Shanghai 200444, China