1. Nazarbayev University Research and Innovation System, 53 Kabanbay Batyr St., Astana 010000, Kazakhstan
2. Purdue University, 500 Central Drive, West Lafayette, Indiana 47907, USA
3. Institute of Microelectronics Technology and High Purity Materials, 6 Academician Ossipyan str., Chernogolovka, Moscow region 142432, Russia