1. Hangzhou Institute of Technology, Xidian University 1 , Hangzhou 311200, China
2. State Key Discipline Laboratory of Wide Band Gap Semiconductor Technology, School of Microelectronics, Xidian University 2 , Xi'an 710071, China
3. Research Center for Humanoid Sensing and Perception, Zhejiang Lab 3 , Hangzhou 311100, China
4. College of Information Science and Electronic Engineering, Zhejiang University 4 , Hangzhou 310027, China
5. Industry-Education-Research Institute of Advanced Materials and Technology for Integrated Circuits, Anhui University 5 , Hefei 230601, China