Abnormal grain growth in aluminum alloy thin films
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.348452
Reference45 articles.
1. Aluminum metallization—Advantages and limitations for integrated circuit applications
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3. Evolution and Current Status of Aluminum Metallization
4. Electromigration Damage in Aluminum Film Conductors
5. Effect of texture and grain structure on electromigration in Al-0.5%Cu thin films
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