Yield and Angular Distribution of Cesium‐Sputtered Molybdenum
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1708120
Reference32 articles.
1. Theory of Cathode Sputtering in Low Voltage Gaseous Discharges
2. Angular dependent sputtering of copper single crystals by 20 keV noble gas ions
3. Extended Theory of Sputtering
4. Deposit Spot Patterns from Low‐Index Planes of Metal Single Crystals in a New Theory of Cathode Sputtering
Cited by 6 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Metal Properties;Mo Molybdenum;1987
2. Sputtering yields of single crystalline targets;Topics in Applied Physics;1981
3. Simultaneous Measurement of Sputtered Constituents of Cu3Au;Journal of Applied Physics;1969-11
4. Electron‐Microprobe Determination of the Angular Distribution of Sputtered Aluminum Atoms;Journal of Applied Physics;1968-02-15
5. Cesium‐Ion Bombardment of Aluminum Oxide in a Controlled Oxygen Environment;Journal of Applied Physics;1967-10
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