1. SKLSM, Institute of Semiconductors, Chinese Academy of Sciences, P.O. Box 912, Beijing 100083, China
2. School of Physical Sciences, University of Chinese Academy of Sciences, Beijing 100049, China
3. School of Physics and Electronic Engineering, Guangzhou University, 510006 Guangzhou, China
4. Research Center for Advanced Information Materials, Guangzhou University, 510006 Guangzhou, China
5. Department of Medical Physics, School of Medical Imaging, Hebei Medical University, Shijiazhuang, Hebei 050017, China
6. College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences, Beijing 100049, China
7. Microelectronic Instrument and Equipment Research Center, Institute of Microelectronics of Chinese Academy of Sciences, Beijing 100029, China
8. School of Microelectronics, University of Chinese Academy of Sciences, Beijing 100049, China
9. Synergetic Innovation Center of Quantum Information and Quantum Physics, University of Science and Technology of China, Hefei, Anhui 230026, China