Distinct nonequilibrium plasma chemistry of C2 affecting the synthesis of nanodiamond thin films from C2H2 (1%)/H2/Ar-rich plasmas
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1617362
Reference26 articles.
1. Crystalline diamond growth in thin films deposited from a CH4/Ar rf plasma
2. Buckyball microwave plasmas: Fragmentation and diamond‐film growth
3. Fullerenes as precursors for diamond film growth without hydrogen or oxygen additions
4. Carbon dimer, C2, as a growth species for diamond films from methane/hydrogen/argon microwave plasmas
5. Synthesis of nanocrystalline diamond thin films from an Ar–CH4 microwave plasma
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