Observation of diamond nanocrystals in carbon films deposited during ion‐assisted microwave plasma nucleation pretreatments
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.360926
Reference13 articles.
1. Evidence of an energetic ion bombardment mechanism for bias‐enhanced nucleation of diamond
2. Textured diamond growth on (100) β‐SiC via microwave plasma chemical vapor deposition
3. Highly oriented, textured diamond films on silicon via bias-enhanced nucleation and textured growth
4. Epitaxial nucleation of diamond on β-SiC via bias-enhanced microwave plasma chemical vapor deposition
5. Epitaxy of diamond on silicon
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