Electron energy distribution function by using probe method in electron cyclotron resonance multicharged ion source
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4829738
Reference7 articles.
1. Measurement of electron energy distribution in low-pressure RF discharges
2. Experimental electron energy distribution functions in argon, nitrogen and oxygen high-density and low-pressure reflex and microwave plasma sources
3. Pulse height analysis using Si-pin diode of x-ray irradiated from a 2.45 GHz electron cyclotron resonance multicharged ion source
4. Measurements of Energy Distributions in ECR Plasma
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1. Initial Experimental Results of Producing Multicharged Ions Efficiently by Lower Hybrid Resonance Heating with Exciting Helicon Waves on Electron Cyclotron Resonance Ion Source;Journal of Physics: Conference Series;2024-05-01
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3. Experimental characterization of non-Maxwellian electron energy distributions in a miniaturized microwave plasma neutralizer;Journal of Applied Physics;2022-03-07
4. Microwave-accessibility conditions estimated by plasma parameters obtained experimentally on electron cyclotron resonance ion source;Review of Scientific Instruments;2021-04-01
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