Electron energy distribution function by using probe method in electron cyclotron resonance multicharged ion source
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4829738
Reference7 articles.
1. Measurement of electron energy distribution in low-pressure RF discharges
2. Experimental electron energy distribution functions in argon, nitrogen and oxygen high-density and low-pressure reflex and microwave plasma sources
3. Pulse height analysis using Si-pin diode of x-ray irradiated from a 2.45 GHz electron cyclotron resonance multicharged ion source
4. Measurements of Energy Distributions in ECR Plasma
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