A study of capacitance-voltage curve narrowing effect in capacitive microelectromechanical switches-Reference-Cited by-同舟云学术

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A study of capacitance-voltage curve narrowing effect in capacitive microelectromechanical switches

Published:2008-09 Issue:9 Volume:93 Page:094101
ISSN:0003-6951
Container-title:Applied Physics Letters
language:en
Short-container-title:Appl. Phys. Lett.

Author:

Olszewski Zbigniew,Duane Russell,O’Mahony Conor

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

Link

http://aip.scitation.org/doi/pdf/10.1063/1.2978159

Reference18 articles.

1. RF MEMS for ubiquitous wireless connectivity: Part 2 - application

2. Proceedings of the Modelling Simulation of Microsystems;Reid J. R.,2002

3. Measurements of charging in capacitive microelectromechanical switches

4. Proceedings of the 34th European Microwave Conference;Rottenberg X.,2004

Cited by 9 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Reliability assessment of MEMS switches for space applications: laboratory and launch testing;Journal of Micromechanics and Microengineering;2014-11-12

2. Glass polarization induced drift in microelectromechanical capacitor;Journal of Applied Physics;2012-05-15

3. Erratum: “Addendum: ‘A study of capacitance-voltage curve narrowing effect in capacitive microelectromechanical switches’ [Appl. Phys. Lett. 93, 094101 (2008)]” [Appl. Phys. Lett. 100, 029903 (2012)];Applied Physics Letters;2012-02-06

4. Addendum: “A study of capacitance-voltage curve narrowing effect in capacitive microelectromechanical switches” [Appl. Phys. Lett. 93, 094101 (2008)];Applied Physics Letters;2012-01-09

5. Kelvin probe force microscopy-based characterization techniques applied for electrostatic MEMS/NEMS devices and bare dielectric films to investigate the dielectric and substrate charging phenomena;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2011-09

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