Chemical vapor deposition of B‐doped polycrystalline diamond films: Growth rate and incorporation efficiency of dopants
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.360393
Reference7 articles.
1. The electrical properties and device applications of homoepitaxial and polycrystalline diamond films
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3. Optical and electrical properties of boron doped diamond thin conductive films deposited on fused silica glass substrates;Applied Surface Science;2016-11
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