Onset of blistering in hydrogen-implanted silicon
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.123430
Reference11 articles.
1. Silicon on insulator material technology
2. Silicon carbide on insulator formation by the Smart-Cut® process
3. Si and SiC layer transfer by high temperature hydrogen implantation and lower temperature layer splitting
4. Transfer of 3 in GaAs film on silicon substrate by proton implantation process
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