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A multiple white light interferometer

Published:1996-10 Issue:10 Volume:67 Page:3416-3419
ISSN:0034-6748
Container-title:Review of Scientific Instruments
language:en
Short-container-title:Review of Scientific Instruments

Author:

Raz Eli

Publisher

AIP Publishing

Subject

Instrumentation

Link

http://aip.scitation.org/doi/pdf/10.1063/1.1147152

Reference4 articles.

1. P. Hariharan,Optical Interferometry(Academic, New York, 1985).

2. S. Tolansky,Multiple Beam Interference Microscopy of Metals(Academic, New York, 1970).

3. S. Tolansky,Surface Microtopography(Interscience, New York, 1960).

4. W. Krung and J. Rienitz,Contribution to Interference Microscopy(Hilger and Watts, London, 1964).

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3. Optical Detection of Surface Damage;Nondestructive Materials Characterization;2004

4. Applicability of white light scanning interferometry for high-resolution characterization of surface defects;SPIE Proceedings;2001-08-03

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