Electrical transport andinsitux‐ray studies of the formation of TiSi2thin films on Si
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.98753
Reference9 articles.
1. Resistivities of Thin Film Transition Metal Silicides
2. Thin film interaction between titanium and polycrystalline silicon
3. Thin film interaction between titanium and polycrystalline silicon
4. Metastable phase formation in titanium‐silicon thin films
5. First Phase Nucleation And Growth Of Titanium Disilicide With An iPhasis On The Influence Of Oxygen
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