Stability of terbium scandate on Si(100)
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3513314
Reference19 articles.
1. Ternary rare-earth metal oxide high-k layers on silicon oxide
2. Dielectric and optical properties of epitaxial rare-earth scandate films and their crystallization behavior
3. Investigation of terbium scandate as an alternative gate dielectric in fully depleted transistors
4. Thermal stability of amorphous LaScO3 films on silicon
5. Thermal stability of dysprosium scandate thin films
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