1. Shanghai Key Laboratory of Superconductor Integrated Circuit Technology, Shanghai Institute of Microsystem and Information Technology 1 , 865 Changning Road, Shanghai 200050, China
2. National Key Laboratory of Materials for Integrated Circuits, Shanghai Institute of Microsystem and Information Technology 2 , Chinese Academy of Sciences, 865 Changning Road, Shanghai 200050 China
3. Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences 3 , Beijing 100049, China
4. School of Microelectronics, Shanghai University 4 , 20 Chengzhong Road, Shanghai 201800, China