Transmission Sputtering of Thin Films by Low‐Energy Hydrogen Ions
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1656794
Reference7 articles.
1. Atomic collision sequences in crystals of copper, silver and gold revealed by sputtering in energetic ion beams
2. On the disordering of solids by action of fast massive particles
Cited by 10 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Sputtering yields of thin films for MeV microbeam irradiation: Preliminary results;Radiation Effects and Defects in Solids;1994-12
2. Morphology and structure of gold, silver and copper layers obtained by sputtering during ion bombardment of targets from these metals;Thin Solid Films;1988-02
3. Transmission sputtering yields of crystalline foils;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1986-03
4. Sputtering yield measurements;Topics in Applied Physics;1981
5. Effects of ion sputtering on semiconductor surfaces;Surface Science;1978-09
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